The Toronto Nanofabrication Centre (TNFC)
Accelerating Nanotechnology Innovation Through Open Access Research Infrastructure
The Toronto Nanofabrication Centre (TNFC) at the University of Toronto is a state-of-the-art research and development facility dedicated to advancing micro- and nanotechnology. Located in the Department of Electrical & Computer Engineering, TNFC supports cutting-edge academic and industrial research by offering access to world-class fabrication tools, cleanroom environments, and expert technical support.
Whether you're a startup building your first prototype or a researcher fabricating complex nanostructures, TNFC provides the infrastructure and expertise to bring your ideas to life.
Services
Equipment-Only Use Access
Some researchers may prefer to access the TNFC on their own or with their own staff. This option may work best for organizations looking to produce a larger number of devices or on a longer-term basis. For these groups, it may be more suitable to use only the facilities and equipment.
Full Service Use - Staff & Equipment
Many researchers require infrequent access to TNFC capabilities to prototype or analyze a small number of devices. For these cases, user access and training may not be practical. TNFC technical staff offer experienced service to perform fabrication and characterization processes on behalf of the user for a predetermined fee.
Key Research Areas
Microelectronics
Microfluidics
MEMS/NEMS
Photonics
Photovoltaics
Integrated Optics
Plasmonics
CMOS Processing
Nanomaterial Processing
Facilities
Pratt Microfabrication Facility
The Pratt Microfabrication Facility supports a wide range of silicon-based fabrication activities, including photolithography, oxidation, thin film deposition, plasma etching, wet etching, device processing, as well as packaging and analysis.
The 400m2 facility is located on the 4th floor of the Pratt engineering building at the University of Toronto. It includes a class 10,000 (ISO Class 7) microfabrication processing area and a class 1,000 (ISO Class 6) photolithography processing area.
Wallberg Nanolithography Facility
The Wallberg Nanolithography Facility houses the state-of-the-art Raith EBPG5000+ Electron Beam Lithography System. The 108 m2 facility is located in the basement of the Wallberg building at the University of Toronto.
To ensure exceptional performance, the system is enclosed in an environmental chamber maintaining temperature stability of 21 ± 0.25 ºC, 0.1 ºC/hr. The 58 m2 Class 100 cleanroom lab space comprises the environmental chamber, control room, processing lab, and gowning room. It also contains a complete suite of equipment for nanolithography, from CAD design to exposed resist development and analysis.
Explore how your organization can collaborate with the Toronto Nanofabrication Centre →
Our Partners
Canadian Nanofabrication Facilities
Alberta NanoFab
Waterloo Quantum NanoFab Facility
McGill Nanotools Microfab
Western Nanofabrication Facility
4DLabs at Simon Fraser University
3IT of Sherbrooke
Contact Us
Faculty Director
Prof. Wai Tung Ng
Faculty Profile
Administrative Staff
Administrative Coordinator
Email: tnfc@utoronto.ca
Technical Staff
Edward Huaping Xu, Ph.D.
Facility Manager, Pratt Microfabrication Facility
Phone: 416 946-5350, Office: Pratt 482, Email: edwardlhuaping.xu@utoronto.ca
Yimin Zhou
Engineering Technologist
Phone: 416 946-8804, Office: Bahen 7292, Email: yimin.zhou@utoronto.ca
Mailing Address
Toronto Nanofabrication Centre
University of Toronto
Faculty of Applied Science & Engineering
10 King’s College Road
Sandford Fleming Building, Room B540
Toronto, Ontario
M5S 3G4